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News

Agilent offers long-lifetime optics with new deep-UV optical coating

Agilent Technologies Europe : 22 January, 2008  (New Product)
Agilent Technologies has introduced a deep-UV optical coating that offers long-lifetime optics that address the growing need for highly accurate and reliable beam delivery in leading-edge medical and semiconductor photolithography systems.
'UV-wavelength lasers and lamps are driving high-volume requirements for optical components,' said Vince Barich, operations and marketing manager for Agilent's precision optics group. 'Challenges for system designers include coating compaction and optic lifetime. Agilent has developed proprietary high-throughput UV coatings that increase component lifetime while minimising compaction, thereby extending the time between maintenance cycles and reducing system down time.'

Reflectivity and damage-threshold testing have been successfully completed, and in independent tests Agilent has qualified multiple coating chambers, thus ensuring product availability.

Agilent's vertically integrated design-to-production facility includes in-house fabrication (shaping, grinding and polishing) and coating (deep-UV to near-IR) capabilities. Comprehensive metrology and use of the latest equipment to monitor and control pressure, temperature and rate ensure accurate and repeatable production processes.

Agilent will be showcasing its new UV optics at Photonics West, January 22-24, 2008, in San Jose, California, USA, on Booth 1037.
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