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XYZ-piezo-scanner makes ideal nanotechnology tool

Lambda Photometrics : 04 June, 2007  (New Product)
Lambda Photometrics has unveiled an ultra-high-resolution positioning and scanning system from PI (Physik Instrumente).
PI is leading manufacturer of nanopositioning and piezo-based precision motion-control equipment for bio-nanotechnology, photonics and semiconductor applications offers.

The minute P-363 PicoCube, together with its ultra-low noise E-536 driver/controller, provide higher resolution and positional stability than previous multi-axis scanning stages.

Features and Benefits:

- High-speed XYZ Scanner for AFM/SPM and manipulation tool for nanotechnology.

- Custom, high-stiffness shear piezo drives provide up to 10kHz resonant frequency for faster response and higher scanning performance.

- Ultra-low-noise controller enables 25picometres (0.025nm) resolution.

- Capacitive feedback for exceptional precision and linearity.

- Parallel Metrology for Better Multi-Axis Accuracy.

- Small and Rugged Design with Titanium Case.

- Vacuum Compatible.

Typical applications for the system include AFM (Atomic Force Microscopy), SPM (Scanning Probe Microscopy) and Nanomanipulation, Bio-Technology, Nanotechnology, Nano-Imprint, Semiconductor and Data-Storage Test Equipment.

PicoCube systems were designed to overcome the limitations of open-loop piezo-tube based scanners which provide high resolution motion but poor linearity and trajectory guidance.

The compact PicoCube is based on robust, high-stiffness piezo drives rather than tubes and employs non-contact, direct-measuring, parallel-metrology capacitive sensors for position feedback.

The low-inertia drives allow for a resonant frequency of 10kHz, important for high speed scanning applications.

Parallel metrology can 'see' all controlled degrees of freedom simultaneously and compensate for off-axis motion in real time.

The benefits are a reduction of runout and off-axis errors, straighter multi-axis motion and improved repeatability.

The new ultra-low-noise E-536 closed-loop controller provides positional stability and can be controlled with analogue or digital signals.

Extensive software support including LabView drivers is provided.

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